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PVD / CVD Hybrid Coater for Multi-layer Film Coating - VTC-150-H

PVD / CVD Hybrid Coater for Multi-layer Film Coating - VTC-150-H

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VTC-16--PW is a compact powder PVD coater, which consists of 2" water cold magnetron sputtering head and vibration stage. The particles will jump on the vibration stage during the coating and form a core-shell structure. The DC magnetron sputter is suitable for coating for metallic materials. RF power source is optional for non-conductive material or carbon. The coater will be useful for preparing special powder for 3D printing and solid-state electrolyte powders.

SPECIFICATIONS

 Power
  • 208 - 240VAC, 50/60Hz, single phase
  • 3000 W
Furnace
  • The Whole PCV/CVD system is integrated into the compact 1100°C Single Zone 5" Verticle Tube Furnace (click Pic. left for detail specs)

Sputtering Head 
  • Click Picture left for detail specs
  • 1" flexible magnetron sputtering head with water cooling jacket is included 
  • The distance between the sputtering head and the sample stage is adjustable from 60 - 100 mm
  • One Water Cold Recirculating Water Chiller 16 L/min Flow is included for cooling sputtering head 
. . . .

Rotary Sample Stage
  • One 3" Dia. the rotary sample holder is in installed on the bottom flange of the vertical tube furnace
  • Rotation speed is adjustable: 1 - 10 rpm for uniform coating
Control Panel
  • 6" color touch-screen control panel with PLC integration for easy operation
  • One panel for all parameters monitor and control: vacuum, current
Ultimate Vacuum Pressure
  • Built-in KF25 vacuum port
  • The system requires an Ar gas tank with a pressure regulator (not included)
  • < 1.0E-2 Torr by Vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets (not sensitive to air)
  • < 1.0E-5 Torr by Turbomolecular pump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air)
  • The lowest vacuum may reach < 4.0E-6 Torr by pumping overnight and baking
Gas Atmosphere
  • One needle valve installed to allow Ar gas inlet to achieve better plasma coating
  • The system requires an Ar gas tank with the pressure regulator (not included)

Target
  • One 1" Copper target is included for testing, target size: 1" Dia. x 2.5mm
  • It also can coat Ag, Al, Cr, Ni, Pt, Ti, Sn, Li, Mg, etc. almost every kind of metallic material
  • Warning: Aluminum, Chromium or Nickel can be coated by this machine, but please view the Recommend Coating Method in the below target link
  • Please using RF Plasma Magnetron Sputtering coater for coating non-conductive materials and carbon
Net Weight
  • 50 kg
Compliance
  • CE approval
  • NRTL (UL 6100) certification is available upon request at an extra cost, please contact our sales representative for a quote

 

 

 

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MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as Graphite dies, O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
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