• Replacement 4 Channel Flow Readout Box for EQ-GSL-MC-3Z,EQ-MFC-B-4Z
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Replacement 4 Channel Flow Readout Box for EQ-GSL-MC-3Z,EQ-MFC-B-4Z

Replacement 4 Channel Flow Readout Box for EQ-GSL-MC-3Z,EQ-MFC-B-4Z

Out of stock

Price: Replacement Part Not For Sale
$1,850.00 USD
Sale Email for Lead Time

SKU: EQ-MFC-B-4Z
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Specification:

Feature
 4 Mass Flow Controller and 4 Monitor
Power
 45W  
Output Power
 +15V ±5% 600mA    - 15V ±5% 1.2A
Voltage
 AC 220V ±10% 50/60Hz
Mass Flow Controller
(Click pic for details)

 Voltage:                            185~245V 50/60Hz
Max. Output Power:          18W
Working Temperature:      5~45 ºC
Max. Pressure:                 3x106 Pa
Accuracy:                          ±1% FS
Controlling Range:
  •   Controller 1: 0~100 SCCM
  •   Controller 2: 1~199 SCCM 
  •   Controller 3: 1~499 SCCM 

Other ranges can be customized at extra cost. Please email to info@mtixtl.com 
Mechanical Pressure Gauge Measurement Range: -0.1~0.15 MPa (0.01 MPa/grid)
Dimension
  • Dimesion: 483 × 140 × 320 mm        
         
Weight 7.5KG
Compliance CE certified 
Warranty One year limited with lifetime support
Operation
Instruction
Oxygen Monitoring (Optional)
 An Oxygen Sensor can be used to monitor the oxygen level of gas(es) used in CVD systems for preventing or reducing oxidation. Please click the picture below to learn more:
         

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