|
Features
|
- Real time measurement and analysis: Multi-layer, thin, thick, freestanding and nonuniform layers
- Extensive material library: 500+ materials
- Support of parameterized materials: Cauchy, Tauc-Lorentz, Cody-Lorentz, EMA
- Flexible: Desktop or in-situ, R&D or inline.
- Measurement: Thickness, optical constants, surface roughness
- User-friendly and powerful: One-click measurement and analysis
|
| Majority of Translucent or Low Absorbing Films |
- Oxides (See Pic 1 for example)
- Nitrides
- Photoresists
- Polymers (See Pic 2 for example)
- Semiconductors: Si, aSi, polySi
- Hard Coating: SiC, DLC
- Polymer Coating: Paralene, PMMA, Polyamides
-
Thin Metal Coating (< 50 nm thickness. See Pic 3 for example)
 |
 |
 |
| Pic 1 - 3 um LiNbO3 |
Pic 2 - 45 um PET |
Pic 3 - 20 nm Cu |
|
| Thickness Range |
- 15 nm - 75 um for non-metallic, translucent materials as listed above
- Note: metallic films can only be measured up to 50 nm reliably; X-Ray measurements are needed for thicker films
|
| Spectral Range |
|
| Precision |
|
| Accuracy |
|
| Stability |
|
| Spot Size |
|
Sample Size Requirement
|
- Minimum 5 mm x 5 mm for reliable measurement
|
| Spectrometer/Detector |
- 2048/4096 pixels CMOS
- 16 bit ADC
- 400 - 1100 nm wavelength range
- Spectral resolution: < 1 nm
- Power 100 -240 VAC, 50/60 Hz, 20 W power
 |
| Light Source |
- 5 W Tungsten-halogen lamp
- CT 2800 degree
- Lifetime: 10000 hours
|
| Reflectance Probe |
- Fiberoptics, 400 um fiber core
- with spectrometer leg and Illumination leg
|
| Face-Up Measurement |
- The film sample faces up with probe and light source pointing down
 |
| Communication Interface and Laptop Computer |
- USB connector to communicate with PC
- One brand new Laptop with software installed is included for immediate use
|
Software: TFCompanion
|
- Large library of refractive index (n) and extinction coefficient (k) values for the most common metallic, dielectric, amorphous and crystalline substrate materials
-
Capability for analyzing simple and the most complex film stacks
- Error estimation and simulation tools allow for factoring in the effects of changing conditions
- Support for parameterized materials with approximations representing optical dispersion in a desired spectral range using few coefficients that can be adjusted
-
 
|
| Software Option |
- Remote control (TCP) based on Modbus protocol at extra cost
|
| Measurement Standard (Included) |
- Bare Si Reference and 200 nm thick silicon oxide test wafer are included as thin-film standards for thickness measurement verification
-
 
|
Dimensions |
- 205 mm L x 250 mm W x 105 mm H (8" L x10" W x4" H)
|
Net Weight |
|
Shipping Dimensions |
- 460 mm L x 460 mm W x 460 mm H (18" L x18" W x 18" H)
|
Shipping Weight |
|
Warranty |
- One-year limited warranty with lifetime support. (Consumable parts such as thin film measurement standard not covered by the warranty)
|
Operation Instruction |
 
|
Application Note |
-
An example of metal thin film thickness measurement using the reflectance spectrometer can be downloaded here (Click Pic below)
 |
