EQ-TM106-LD is a quartz crystal microbalance (QCM) for in-sit film thickness / deposition rate measurement. It is based on the principle that the mass of a deposited film on a quartz crystal can be measured by monitoring the change in crystal’s oscillating frequency. If the density of deposited material is known, the thickness can be determined to a high resolution of sub-Angstrom (0.037 Å for this equipment).


SPECIFICATIONS:

Power	5 VDC, 400 mA
Frequency Range	6.0 to 5.0 MHz (fixed)
Frequency Resolution	+/- 0.03 Hz @ 6 MHz
Measurement Speed	Up to 10 measurements per second
Reference Frequency Stability	+/- 2 ppm
Thickness and Rate Resolution	+/- 0.037Å @tooling = 100%, density = 1.00 g/cm3, Z-ratio = 1.00, frequency = 6.0 MHz
Display Resolution	0.1 Å
Operating Temperature	0 to 50°C
Water Flow Requirement	Minimum water flow 150-200 cc/min, 30° C max
Water Feedthrough	1/8 in. (3.0 mm) O.D. tubing
Standard Package	Sensor with the quartz holder is included. 6″ BNC Cable M/F is included SMA Female to Female Bulkhead Connector Adaptor is included (For MTI’s film deposition systems, feedthrough with SMA female (in the deposition chamber) to BNC female (outside chamber) adapter) Gold quartz crystals of one set (10 PCS) is included. Quartz holder 6″ BNC-J3 Female to SMA-J3 Female Cable SMA Bulkhead Adaptor Gold quartz crystals
Quartz Crystals (Optional) Alloy	Starting frequency: 6 MHz Crystal size: 14 mm Dia. Anchor electrode pattern for maximum crystal stability and life Gold and alloy electrode quartz crystals can be ordered at MTI (Click pictures below or select product options) Choose the quartz crystal with the right electrode material for your application - gold, silver, alloy Recommend gold electrode crystals for most applications Silver electrode crystals work well for processes with high heat loads, such as sputtering Alloy electrode crystals are recommended for high-stress deposition, such as optical coating with dielectric materials and semiconductor processes with high-stress materials
Operating System	Windows 8, Windows 7, Windows Vista, Windows XP, Windows 2000
Software	STM-2 software is included (Download link is also available here) STM-2 LabVIEW™ Application Software is available here. An additional laptop ($699) with software pre-installed is highly recommended and can be ordered at MTI
Installation
Compliance	CE Certificated (Assembled in the USA)
Production Dimensions	Monitor Size: 114 mm L x 76 mm W x 25 mm H Quartz Holder: 325 mm L x 25 mm W x 15 mm H
Monitor Weight	57 g
Warranty	One-year limited warranty with lifetime support
Operation Instructions
Application Notes	If you need to test the resistance of a coating of the electrode to cracking or detachment from a substrate, Please click to order Flexibility Tester. Feedthrough for TM106 Thickness Monitor is available to purchase. If you need customized feedthrough, please email us for more information. Drawing FlexibilityTest Application for Sputtering Feedthrough

LIST OF PARTS: