• Turbopump Station with a Scroll Dry Pump - EQ-PAC-LD
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Turbopump Station with a Scroll Dry Pump - EQ-PAC-LD

Turbopump Station with a Scroll Dry Pump - EQ-PAC-LD

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Price: RFQ

SKU: EQ-PAC-LD

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The PAC Pumping Station consists of a high-quality Pfeiffer's High-Speed turbo molecular pump (33L/s) and a 200L/min scroll pump. Large LCD digital can display the instant pressure reading and the information pump's running condition. 600mm x 600m top table can withstand any type of equipment up to 600 Lbs.  It is an ideal tool for most of MTI's tube furnaces to achieve high vacuum >10-4 torr
 
Specifications
 
Mobile Cart Structure
  • Larger Mobile cart size: 800 (L) x 700 (H) x 600(H), mm 
  • Max. Loading:       600 Lbs on top
Turbo Pump Station
  • Pfeiffer, pumping speed: 33 L/s
  • Port: KF40
  • Other Pfeiffer turbopump station with different flange is also available 
    Backing Pump
    • Pfeiffer scroll pump
    • Pumping Rate: 200 L/min 
    • Max. Vacuum 9e-3 mbar (0.4 Pa)
    VOLTAGE
    • Please choose the voltage from the options bar.
    Control panel One button operation - the diaphragm pump and the turbo molecular pump will start after pressing "start" button.
    System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
    Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
    LCD screen - double lines parameters checking interface     make the working easier to be handled.
    Pump and Accessories
    • Molecular pump with KF40 to T type of Vacuum Tube and KF25 to Vacuum Gauge
    • Vacuum gauge with KF25 port to install to T -tube
    •  1000 mm length SS vacuum bellows with KF40 port to connect to furnace flange
    • One  KF40 to KF25 adapter is included to connect the pump to MTI's furnace which has KF25 port on  flange

     
    Volume Flow Rate
     
    • Nitrogen    N2     33 L/s
    • Helium      He     39 L/s      ( 2340L/minute)
    • Hydrogen  H2     32 L/s

    Compression Rate
    • Nitrogen    N2     >1E11
    • Helium      He     6*1E6
    • Hydrogen  H2   >1E5

    Ultimate Pressure

    <7.5E-9Torr (1E-6Pa) without any leaking

    Start-up Time

    2 Min.

    Working Range

    From 750Torr to <7.5E-7Torr (1E5Pa ~ <1E-4Pa)

    Backing Pumping Speed

    0.9 m^3/H for 50Hz and 1.0m^3/H for 60Hz 

    Duration /max. power

    100/110 W

    Mains Connection

    90-132 V/ 185-265V (selectable)

    Weight

    50 Kg

    Optional Accessories

    Combinations of EQ-PAC-LD Turbo-molecular Pumping Station with EQ-VPC-MV Precision Vacuum Pressure Regulating System will be a solution for precisely controlling the vacuum pressure in a vacuum chamber/system.  Order Turbo-molecular Pumping Station with Precision Vacuum Pressure Regulating System from product options or Click the picture below for Precision Vacuum Pressure Regulating System
            

    Warranty    		 One-year manufacturer warranty.(Attention: Improper use will cause all claims for liability and warranties to be forfeited. Improper use is deemed to be all use for purposes deviating from those mentioned in below, especially: 
    • Pumping of corrosive or explosive media.
    • Pumping of condensing vapors.
    • Pumping of liquids.
    • Pumping of dust.
    • Operation with improper high levels of insulated heat input.
    • Operation in potentially explosive areas.)
    Application Notes
    (these parts are NOT included in the standard package)
    • To protect the environment & human health, please use Traps & Filters to minimize exhaust. 
    • Service for the turbopumps is recommended every 4 years under conditions with light gas loads. 
    Complaince 
    • TUV Certified  ( Turbo pump )
    Manual  Operation Manual from Peiffer  Catalog

     

    Standard Package 

     P/N
      Description
     Quantity
     Picture&Link
    EQ-KF-Valve-D40 KF-40 Vacuum Right-Angle Valve 1

     EQ-KF-Pipe-D40

     KF-40 SS Vacuum Bellows (1000 mm )
    1

    EQ-KF-Pipe-D25-600

    KF-25 Flexible Stainless Steel Vacuum Bellow (600mm)
    1

     EQ-KF-Clamp-D40

     KF-40 Quick Clamp with Rubber O-Ring
    4

     EQ-KF-Clamp-D25

     KF-25 Quick Clamp with Rubber O-Ring
    ×

    Manufacturer Part Number: