OTF-1200X-II-80HG-UL is a two-heating zone tube furnace with two-channel gas flow control, liquid evaporator, humidity monitor, as well as hydrogen gas leaking detector. Such a system is designed for hot corrosion research or CVD processing with hydrogen gas under controlled humidity conditions. One of the two CVD gas lines through the liquid evaporator assists with the delivery of liquid vapor. Precision digital humidity monitor can measure water content with accuracy +/-1.5%FS. The Honeywell hydrogen monitor will shut off the hydrogen gas inlet valve immediately upon detecting leaks of hydrogen gas.
SPECIFICATIONS
|
- Double shell casing with cooling fans
- High-purity alumina fibrous insulation for max. energy saving
- Split cover enables faster cooling and easy operation
- A hydrogen detector and solenoid valve are included for safety measures
- The liquid evaporator is heatable with temperature control to produce a mixing of hydrogen and liquid vapor.
- The hydrogen gas furnace must be placed under a fume hood which is not included.
|
Power |
4 KW Max |
Input Voltage |
AC 208 - 240V single phase (30A air breaker is required) |
Heating Elements |
FeCr27Al7MO2 |
Heating Zone Length |
Two heating zones: 8" (200 mm) length of each zone, 16" (400 mm) total Constant temperature zone: 150 mm within +/- 1oC when two zones are set at same temperature |
Temperature Uniformity |
+/- 1°C in heating Zone |
Continuous Working Temperature |
1100°C |
Recommended Heating Rate |
10°C /min |
Processing Tube and Flanges |
-
High purity quartz tube: Φ80 (OD)×Φ74 (ID) ×1000 L, mm
- Vacuum flange: SS304 flanges are included to achieve vacuum up to 10^ - 5 torr by turbopump.
|
Temperature Controllers 
|
- Two digital temperature controllers with 30 programmable segments for precise control of heating rate, cooling rate, and dwell time.
-
Built-in PID Auto-Tune function with overheating & broken thermocouple protection.
- Over temperature protection and alarm allow for operation without attendant(s).
- +/- 1 ºC temperature accuracy.
- RS485 port is installed in front of the panel for PC connection
- PC control module and software are included for computerized temperature control. Click here to review detailed information.
|
Float Flow Meter
|
- Two flowmeters 50-500ml/min are built on the gas inlets.
- One flowmeter is for Hydrogen delivery while the other is mainly for CVD gas with liquid vapor
- The extra flowmeter is available upon request at extra cost.
- You may consider using our MFC gas delivery station 1 - 9 channel for more accurate gas control
|
Bubbler/ Liquid Evaporator
 |
- Such a liquid evaporator is suitable for liquid sources and chemical precursors delivery in CVD processes.
- One stainless steel container is included with a capacity of 600 ml ( 80OD x 200H, mm)
- The container is inserted into a small cylindrical heater with thermal insulation
-
The container can be heated up to 250°C and controlled by a programmable temperature controller.
- Two SS needle valves and one pressure gauge are built on the container (click the picture left for details)
|
Humidity Monitor
( included)
|
- One precision humidity monitor is connected to the processing tube flange with KF25 adaptor
- Measurement range : 0 - 100% RH with 1.5%FS accuracy, or -60º ~ +60º DP with +/-0.3º accuracy.
- Tips: You may adjust the evaporator's (water inside) temperature and H2 gas flow rate to achieve desired humidity level.
|
Hydrogen Detector System
 (included)
|
- Working Temperature Range: 40ºF to +149ºF (-40ºC to +65ºC)
- Alarm Point: H2 Limited Explosive Line 20% (20% LEL). Once detecting H2 gas beyond the point, it will shut off the inlet valve to the H2 automatically.
|
Options for upgrading |
- Anti-corrosive capacitance Diaphragm Gauge to measure the vacuum pressure ( click pic 1 )
-
Multi-channel gas mixer with a precision mass flow controller is also available. ( click pic 2 )
- A dry pump is highly recommended for LPCVD, especially if the carrier gas is flammable. (click pic. 3)
 Pic. 1  Pic. 2  Pic. 3
|
| Warranty |
One-year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty).
|
|
Compliance
|
- CE Certified
- NRTL or CSA certification is available upon request at extra cost.
|
Furnace Dimensions |
1400×600×1200mm |
Product Net Weight |
100Kg
|
Operation Instructions |
|
