Skip to product information
1 of 1

Two Zone IR-Heating RTP Tube Furnace (4'' ID ) with Sliding Sample Holders - OTF-1200X-IR-IISL

Two Zone IR-Heating RTP Tube Furnace (4'' ID ) with Sliding Sample Holders - OTF-1200X-IR-IISL

Out of stock

Price: RFQ

SKU: : \OTF1200XIRIISL

Choose your Variant:



View full details

OTF-1200X-IR-IISL is a dual-zone IR heated rapid thermal processing (RTP) tube furnace with 4" ID quartz tube and two sliding sample holders for easy operation. It is capable of achieving a maximum heating rate of 50 °C/s  and a cooling rate of 117 °C/min. The furnace is designed for growing two-dimension and superconducting materials via hybrid physical-chemical vapor deposition (HPCVD), where one heating zone is used as a solid evaporating source and another zone is for vapor deposition. The precision temperature controllers are able to set up programmable heating and cooling profiles with up to 30 temperature segments. 
.

SPECIFICATIONS

Furnace Features
(optional)
  • Double-layer steel casing with air cooling keeps furnace surface temperature lower than 60°C.
  • Heated by shortwave IR tube lamps for fast heating
  • Two heating zones, 195 mm each, a total of 390 mm in length for HPCVD
  • Two sliding sample holders for easy loading/retrieving samples or fast cooling under ambient conditions. 
  • A retractable bellow is an option for the flange assembly, which allows flash heating and fast cooling under inert environment (optional).
  • Vacuum flanges and the digital vacuum gauge are installed for immediate use.   
Power
  • AC 208-240V,  single-phase, 50/60 Hz
  • MAX 24 kW, 100 A power supply required. (Max. peak experimental current: 78 A).
Heating Element
  • 16 pcs 1.5 kW halogen heating tubes,  ( OD = 13.3 mm,  L= 390 mm )
  • Standard working life: 2000 hrs.  ( depends on the heating rate )
  • The halogen light tube is consumable.  Please click the picture left to order spare.
Max. Temperature
  • 900°C max (< 10 minutes )
  • 800°C (< 30 minutes )
  • 600°C (continuous operation)
Temperature Accuracy
  • ± 1°C
Max. Heating Rate
  • RT ~ 800ºC: 50 ºC/s
  • 800 ºC ~ 900 ºC: 10 ºC/s
Max. Cooling Rate
  • 60 ºC/min under 200 mTorr environment
  • 117 ºC/min under atmospheric pressure
  • 10 °C/min slowest
Process Tube Size
  • High purity fused quartz tube
  • Φ110 (OD) × Φ106 (ID)× 740 (L) mm
Sliding Rails 
  • Dual sliding rails made of Cr plated steel
  • Sliding rail length: 400 mm
Thermocouple
  • Two K type, 1/4" Dia x 24" length   

Temperature Controller  
   
  
       

  • Two temperature controllers for controlling two zones independently via SCR
  • PID automatic control with up to 30 programmable segments for precise control of heating rate, cooling rate and dwell time.
  • Built-in thermocouple broken protection.
  • Over-temperature protection and alarm allow for operation without attendant(s).
  • ± 1 ºC temperature accuracy for dwelling.
  • RS485 Communications Port.
  • PC Control:  
    • An MTS-02 control module is included for PC control on this furnace.
    • The new version of PC module is now compatible with Lab View 05/08/2014
    • A laptop PC can be ordered for $500 together with the furnace. We recommend ordering a computer (laptop) from us to avoid software installation problems as we will perform installation and testing before shipping. For more information please click here

Vacuum Flanges

  • SS water-cooled flanges on both sides. 
  • Left flange:
                       1/4" thermocouple feedthrough
                       1/4'' tube fitting
  • Right flange:
                       KF 25 port with a right angle gate valve for vacuum pump
                       Needle valve with barb fitting as a venting port
  • A digital vacuum gauge is included
  • Retractable bellow design is optional on the left flange, which allows sample flash heating or retrieving for fast cooling under inert gas. 

Vacuum Level 

  •  Limited by the vacuum pump
    • 10^-2 torr can be achieved by the mechanical pump
    • 10^-4 torr can be reached by molecular pump
  • The pump is not included. ( please click the picture below to order )
  •    

Water Chiller  (optional)

  • Cooling water is required for the flange set.
  • Please make sure the flow rate of cooling water is ≥ 10L/min, water temp. < 25ºC; pressure > 25 PSI.
  • We suggest EQ-KJ5000 Series recirculating water chiller as a cooling system (please order separately at related products below).

Dimensions

    1300mm×600mm×810mm

Net Weight

  • ~180 Kg

Shipping Weight

  • 500 lbs

Warranty

  • One year limited manufacturer's warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order replacements at related products below).

Laptop, software & WiFi Control (Optional)

  • Brand new laptop with Microsoft Windows 10 and Microsoft Office 2013 (30 days free trial) for immediate use.
  • Labview Based Temperature Control System (EQ-MTS01) enables the user to edit temperature profile, manage heat-treatment recipe, record and plot data for MTI furnaces.
  • A wireless remote control provides up to 300 meters of operating range.
  • The features above are available upon request at an extra cost (up to $1,000). Please contact us for more information.
  • Note:  The software is only compatible with MTI’s Yudian Temperature Controller
  •     

Manufacturer Part Number: