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Power
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- Voltage: Single-phase 208 - 240 VAC / 50/60Hz, (20 A breaker installed)
- 3.6 KW max.
- Note Power cable is included but without the plug. Please install a plug on your own or click the link below the picture to choose a plug according to your country or your lab requirement
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Working Temperature
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<= 1000 °C continuously
- Max. 1100 °C, < 30 minutes
- Temperature Uniformity: +/- 2°C
- Note: <= 1150 °C continuously is available upon request by GE214 grade quartz tube at the extra cost
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Heating Rate
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- Max. 20°C/ min
- Recommended. 10°C/ min
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Heating Elements
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- High-quality Ni-Cr-Al resistance wire
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Chamber Dimensions
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Quartz Tube & Effective Heating
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Vacuum Flange
Note: The standard flange door has upgraded to feedthrough type on Feb 15, 2016.
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- Stainless steel water-cooled flange assembly with two quick-connect ports. All of the seals are provided by silicone o-rings.
- Multi-function of the quick-connect ports via 1/4" OD bored alumina tubes.
- Gas inlet/outlet near the sample surface. (Fig. A, B, C)
- Thermocouple feedthrough (Fig. A, B, C, D); Optional K type 1/4"ODx18" L
- Electric feedthrough. eg. Four probe resistance measurements (Fig. D)
- One bored Al2O3 foam refractory block (190Dia * 50mm) is provided. (Fig. F)
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Thermocouple or electric Alumina Feedthrough (O.D 6.35mm, I.D 4.0 mm, L 300mm) is available upon request (Since Apr 2016)
- Mechanical Vacuum Gauge(included as standard accessory), which ranges from -0.1 to 0.15Mpa.
Fig. A
Fg. B
Fig. C
Fig. C
Fig. F |
Gas Inlet and Outlet & Water cooling
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- One gas purging inlet (1/4" hose adapter ) with a valve is on the left side of the furnace
- The inert gas can be introduced into the chamber via the inlet for purging purposes.
- If a continuous gas flow is needed, refer to the additional gas inlet and thermocouple probe below.
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A water cooling jacket has been built inside the flange to protect the vacuum sealing O-tings. The inlet and outlet ports located on the left side of the furnace are used for connecting to a water chiller through two 12 mm Dia. polyurethane tubes (16L/minute water flow is required). Please click the picture left to order the water chiller.
- A water chiller is required for heating temperatures above 500°C (thermal block is placed)
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Temperature Controller
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- NRTL-certified digital temperature controller is included.
- Proportional–integral–derivative control (PID control) and auto-tune function
- 30 segments programmed with ramping, cooling, and dwelling steps
- Built-in over-temperature alarm and thermocouple failure alarm
- +/- 1 ºC temperature control accuracy
- The Default DB9 PC communication port is included for connecting to a PC
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Eurotherm Temperature Controller is available at an extra cost with +/-0.1°C accuracy.
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Options
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Digital Pressure Gauge (optional) A gas-type independent(above 10 mbar) digital vacuum gauge with a wide range between 3.8x10-5 to 1125 Torr. ( Click Pic. 1 to order )
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You may choose a gas mixer to deliver multiple gasses with control over gas composition and flow rate (click pictures below to order separately).
Pic. 1
Pic. 2
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| Options |
- The sample holder is not included in the furnace. You may check Pic. 1 below to order
- You may order quartz wafer boat to anneal wafer up to 6" ( Pic.2)
- Optional Quartz Thermal Block is available upon request as the refractory block, which can help achieve a higher vacuum level and avoid potential contamination problems, please order Quartz Thermal Block.
- A 4-holes 1/4" Alumina Tube can be used for inserting 4 wires (e.g. Pt wires) through the holes for measuring the electrical properties at the high temperature at extra cost.
sample holder Quartz boat for wafer Quartz Thermal Block 4 wires feedthrough |
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Vacuum Pressure
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- Vacuum Level is dependent on the vacuum pump used, connected pipe, interior refractory block's materials, etc. By using KFD25, stainless steel pipe, MTI's two-stage mechanical pump, and KF25 Ball valve, the furnace can achieve vacuum levels below:
- 10-2 torr via mechanical pump within 30 minutes
- 10-4 torr via turbo-pump within 30 minutes with the Quartz Thermal Block at 900C
- Optional:
- The vacuum pump and pipe are not included, please click on the picture below to order.
- For achieving a higher vacuum level, a Turbopump is necessary.
- Spare sealing O-ring is available at extra cost ( click 2nd picture to left below )
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KF25 Right-Angle Valve for quick connection to KF25 Bellows (click the picture 3 below ).
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Compliance
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- CE Certified
- NRTL or CSA certification is available upon request at extra cost.
- Patten Number: ZL-2011-2-0102249.4 SINCE 2011-5-19
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Warning
Click here to learn the installation of a gas regulator
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- Tube furnaces with quartz tubes are designed for use under vacuum and at low-pressure < 0.2 bars
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Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
- Never heat the furnace while the gas release valve is closed when a positive pressure condition exists within the furnace chamber.
- Max. 1000°C is limited on all quartz tube furnaces under vacuum to avoid the quartz tube's deformation.
- The flow rate for gasses should be limited to < 200 SCCM to reduce thermal shocks
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