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12500 RPM Ultra-Hi Speed Spin Coater for 4" Max w/ Vacuum Chuck- VTC-100PAX

12500 RPM Ultra-Hi Speed Spin Coater for 4" Max w/ Vacuum Chuck- VTC-100PAX

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Price: RFQ

SKU: VTC-100PAX

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VTC-100PAX is an ultra-fast spin coater up to 12500 rpm for Max. 5" dia. wafer.  The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has an LCD display for programming various parameters up to 12 programs and 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion protected to make it cleanroom compatible.  The spin-coater can be used in the glovebox with Ar gas.


SPECIFICATIONS:


Main Features
  • 500 ~ 12500 RPM spinning speed programmable ( 13000 max for < 60 seconds)
  • Accept substrate from 10 mm to 5" 
  • PP chamber for anti-corrosive operation.
  • One gas inlet port on top of the cover can fill inert gas during coating
  • One 20ml Plastic Syringe is included
  • Suitable using Ar gas (vacuum pump must be outside glovebox)
  • The safety interlock is integrated into the lid

Vacuum Chuck
  • Chamber size: 150 mm diameter 
  • 2 sets of Aluminum vacuum chucks of different sizes can hold the substrate from 20mm to 100 Dia. 
 

Vacuum Pump (Optional)
  • One compact oilless vacuum pump is optional. 
  • The feedthrough is needed for the vacuum pump to use in the Ar glovebox equipment. The vacuum pump has to be placed outside of the glove box. 
  • The feedthrough is not included. 
Control Panel
  • The digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click the picture below-right to see the typical program setting)
    • Speed: 500 rpm - 12500 rpm programmable
    • Duration: 0 - 999 seconds for each segment
    • Acceleration: 100 - 2000 rpm / sec adjustable
    • Speed Accuracy: < 5%
Input Power
  • AC 110V or 220V is selectable ( please confirm before order )
  • 1000 W total for the oilless pump and spin cater
  • 24VDC high-speed motor


Gas Inlet		 6mm diameter gas inlet port allows customers to fill desired gas into the chamber, which can make coating under an inert gas flow environment.
Liquid Injection

 
       
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 Compliance
  • Rusting and damage due to improper storage conditions or maintenance are not covered by a warranty
  • ALL electric parts are CE, NRTL, and CSA Certified, and no need for extra certification 
Warnings
  • Do not over flush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues that remain in the bow/base.
  • If necessary, turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the cleaning instruction for the spin coaters.

 

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Net Weight:

  •  12 Kg

Shipping:

  • Shipping Dimension: 40"(L) x 30"(W) x 30"(H)
  • Shipping Weight: 46 kg (100 lbs)

MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: