VTC100PA-PTFE is a tabletop spin coater up to 5" diameter at Max. 10000 rpm equipped with a heatable PTFE cover. Two ultrasonic spray nozzles and a heatable glass syringe are included as multiple functions to make liquid atomized or provide a heated solution. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, and 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion-protected to make it cleanroom compatible.
This spin coaster can be used inside the glovebox with Ar gas (Vacuum pump must be placed outside the glovebox).
SPECIFICATIONS:
Features
|
-
500 ~ 10000 RPM spinning speed programmable
-
PTFE chamber is capable of drying temperatures up to 200°C.
- Accept substrate from 5 mm to 5"
- Ultrasonic spray nozzles are included to make liquid-atomized via gravity and low-pressure compressed air.
- The heatable glass syringe is used to provide a heated solution for spin coating.
- One gas inlet port on top of the cover for gas filling during the coating.
- The safety interlock is integrated into the lid.
|
Liquid Injection
|
- Three liquid injection methods are designed:
- The ultrasonic spray nozzles are made of Titanium alloy with a power controller for DIY spray pyrolysis. (Pic.1&2)
- The heatable glass syringe with a digital single-point PID temperature controller up to 120°C (<10 minutes) (Pic.3)
- A 20ml plastic syringe is included. (Pic.4)
-
Pic.1 Pic.2 Pic.3 Pic.4
|
Coating Chamber
|
- PTFE chamber for anti-corrosive operation
- Chamber size: 150 mm diameter
- Max. Temperature: up to 200°C (<10mins)
- A set of PTFE vacuum chucks (Ø 40mm and Ø 10mm) are included to hold substrates from 1-inch to 4-inch wafers.
- About "How to use a vacuum chuck to hold a 10mm square sample", please click the video on the right below.
|
Vacuum Pump |
|
Programmable Control
|
- The digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click the picture left to see typical program settings).
- Speed: 500 rpm - 10000 rpm programmable
- Duration up to 60 seconds for each segment
- Acceleration: 100 - 2000 rpm/sec adjustable
- Accuracy: < 5%
|
Input Power |
- AC 220V (Please email us for AC 110V Version)
- 1000 W total for the oilless pump and spin coater
- 24VDC high-speed motor
|
Gas Inlet |
- A 6mm diameter gas inlet port on top of the cover allows customers to fill desired gas into the chamber, which can make coating under a variable gas flow environment.
|
Optional
|
-
PE heating cover with a digital single-point PID temperature controller up to 120°C(<10 minutes) is available upon request. The drying process solidifies the as-coated film in less than a few minutes. (Pic.1)
-
UV LED lights and controller with 365 nm wavelength for curing and polymerization are available upon request. (Pic.2)
-
Pic.1 Pic.2
|
Application Notes |
- To use inside the Ar glovebox, feedthroughs are required to connect the spin coater, the vacuum pump, and the controller, which is optional upon request.
- To achieve optimal coating quality, please consider cleaning substrates with a plasma cleaner before coating (Pic.2) to significantly reduce the surface tension on the substrates.
- The OFDP-2 is a tiny silent powerful diaphragm pump, which is made in Germany and provides excellent vacuum performance.
Pic.1 Pic.2 |
Compliance |
- CE Certified
- NRTL or CSA certification is available at an extra cost.
|
Warnings |
- Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues in the bow/base.
- Please turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
- For more details about the cleaning procedure, please review the "Cleaning Instructions for the Spin Coaters".
|