Hi-Speed Spin Coater (10K rpm & 5" max) w/ PTFE Heating Cover and Ultrasonic Spray - VTC100PA-PTFEUS

Hi-Speed Spin Coater (10K rpm & 5" max) w/ PTFE Heating Cover and Ultrasonic Spray - VTC100PA-PTFEUS

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SKU: : \VTC100PA-PTFEUS

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VTC100PA-PTFE is a tabletop spin coater up to 5" diameter at Max. 10000 rpm equipped with a heatable PTFE cover. Two ultrasonic spray nozzles and a heatable glass syringe are included as multiple functions to make liquid atomized or provide a heated solution. The spin head actuator is a precision DC servo motor with accurate speed and acceleration control. The substrate can be held by vacuum (for thinner objects). The device has a user-friendly keyboard and LCD display for programming various parameters up to 12 programs, and 6 segments. Spin duration, spin speed, and acceleration can be programmed from the front panel. All components in the device are corrosion-protected to make it cleanroom compatible.
This spin coaster can be used inside the glovebox with Ar gas (Vacuum pump must be placed outside the glovebox).


SPECIFICATIONS:

Features
  • 500 ~ 10000 RPM spinning speed programmable
  • PTFE chamber is capable of drying temperatures up to 200°C.
  • Accept substrate from 5 mm to 5"
  • Ultrasonic spray nozzles are included to make liquid-atomized via gravity and low-pressure compressed air.
  • The heatable glass syringe is used to provide a heated solution for spin coating.
  • One gas inlet port on top of the cover for gas filling during the coating.
  • The safety interlock is integrated into the lid.
Liquid Injection
  • Three liquid injection methods are designed:
  • The ultrasonic spray nozzles are made of Titanium alloy with a power controller for DIY spray pyrolysis. (Pic.1&2)
    • One cylindrical nozzle - provides a narrower spray pattern with ~2 cm diameter.

    • One cone nozzle - provides a wider spray pattern with ~ 4 cm diameter.
  • The heatable glass syringe with a digital single-point PID temperature controller up to 120°C (<10 minutes) (Pic.3)
  • A 20ml plastic syringe is included. (Pic.4)
  •    
       Pic.1            Pic.2                    Pic.3             Pic.4      
Coating Chamber
  • PTFE chamber for anti-corrosive operation
  • Chamber size: 150 mm diameter
  • Max. Temperature: up to 200°C (<10mins)
  • A set of PTFE vacuum chucks (Ø 40mm and Ø 10mm) are included to hold substrates from 1-inch to 4-inch wafers.
  • About "How to use a vacuum chuck to hold a 10mm square sample", please click the video on the right below.
       



Vacuum Pump

Programmable Control
 
  • The digital control panel can store 12 programs and each program has 6 segments programmable for speeds, acceleration, and spin duration (please click the picture left to see typical program settings).
  • Speed: 500 rpm - 10000 rpm programmable
  • Duration up to 60 seconds for each segment
  • Acceleration: 100 - 2000 rpm/sec adjustable
  • Accuracy: < 5%

Input Power
  • AC 220V (Please email us for AC 110V Version)
  • 1000 W total for the oilless pump and spin coater
  • 24VDC high-speed motor


Gas Inlet
  • A 6mm diameter gas inlet port on top of the cover allows customers to fill desired gas into the chamber, which can make coating under a variable gas flow environment.



Optional
  • PE heating cover with a digital single-point PID temperature controller up to 120°C(<10 minutes) is available upon request. The drying process solidifies the as-coated film in less than a few minutes. (Pic.1)
  • UV LED lights and controller with 365 nm wavelength for curing and polymerization are available upon request. (Pic.2)
  •    
    Pic.1                             Pic.2
Application Notes
  • To use inside the Ar glovebox, feedthroughs are required to connect the spin coater, the vacuum pump, and the controller, which is optional upon request. 
  • To achieve optimal coating quality, please consider cleaning substrates with a plasma cleaner before coating (Pic.2) to significantly reduce the surface tension on the substrates.
  • The OFDP-2 is a tiny silent powerful diaphragm pump, which is made in Germany and provides excellent vacuum performance.
     
        Pic.1                       Pic.2
 Compliance
  • CE Certified
  • NRTL or CSA certification is available at an extra cost.
Warnings
  • Do not overflush the water bowl/base with any kind of liquid. Excess liquid will leak into the motor shaft and cause damage. Please use a fabric cloth to wipe out the residues in the bow/base.
  • Please turn on the water outlet when flushing the water bowl/base to avoid liquid overflowing during the operation.
  • For more details about the cleaning procedure, please review the "Cleaning Instructions for the Spin Coaters".

 

Product Dimension:

  • 450mm Depth ×280mm W ×340mm H

MTI offers a One-Year limited warranty with lifetime support(may cause a fee) for this product.

The MTI One Year Limited Warranty does NOT cover

  • Consumable parts such as O-rings, crucibles, screws, washers, etc.
  • Any damage and rust resulting from improper storage or maintenance.
  • Any damages caused by the use of corrosive and acidic gases.
  • Any damage resulting from failing to adhere to the individual product's specific operation requirements, such as water cooling, venting, etc.
Manufacturer Part Number: