• 220 VAC 50/60Hz, single phase.
• 1400W 
• 110 V power is available via a 2000 W transformer (optional)

• Output Power: 5 -300W adjustable with ± 1% stability
• RF frequency: 13.56 MHz ±0.005% stability
• Matching: Automatic with variable air capacitor
• Cooling: Air cooling
• Noise: <50 dB
• Power: 110 -240VAC, 50/60Hz
• Dimension: 400 W x 450 D x 80 H, mm

Sputtering Gun and target

• Made of high-quality materials of stainless steel and ceramics. 
• Electromagnetic finite element calculations are used to design the permanent magnetic assembly to achieve high field strength and a uniform field profile. 
• The magnet is coated with protective material against cooling water corrosion to maximize durability.
• Standard RF connector, which matches a wide range of DC and RF sputtering power supplies.
  
• Easy to install a standard fitting with an included quick connector
• 2" Copper Backing Plate (EQ-CBP-2) is included.
• Target replacement is easy, and no need to 
• 2"Dia x 0.25" thickness target may be available upon request at an extra cost

Quartz Tube and Flanges

• Special quartz tube, OD 180 mm in the center and OD 130 mm at both ends, and a length of 700 mm 
• 4 blades are welded inside the center tube for stirring powder during roating
• The quartz tube is mounted on a metal case, which  can be rotated and rocked
  • Rotating speed:  1- 10 RPM
  • Rocking angle: +/- 4 deg. 
• 2" RF sputtering gun is inserted into the tube via an air-tight flange from the left with gest-inlet
• The right side flange is installed with a vacuum gauge, valve, and gas outlet
• A digital vacuum gauge is includedThe 
• KF25 vacuum port is installed to connect the vacuum pump

Water chiller

• 16 L/min flow rate recirculating water chiller is included to cool the sputtering gan

Optional

• A vacuum pump is required and is optional
  • < 1.0E-2 Torr by Rotary vane vacuum pump (not included) for Au, Ag, Pt, Cu, Mo targets
  • < 1.0E-5 Torr by Turbopump (not included) for Al, Mg, Li, Lr, Ti, Zn targets (sensitive to air)
    
• A digital gas delivery system may be required and optional

• CE approval
• NRTL (UL 6100) certification is available upon request at an extra cost. Please contact our sales representative for a quote