GSL-1200X-50-MWPE is a microwave-assisted CVD tube furnace (MPCVD). It integrates the 2.45GHz microwave generator, heating modules, and 2" OD quartz tube furnace with vacuum-sealed flanged to provide stable plasma from 800oC to 1200oC under ~4.5 torr vacuum.
It is the most cost-effective furnace for both vacuum tube furnaces without plasma and MPCVD for nano-material research.
SPECIFICATIONS:
Furnace Features
|
- 1400W 2.45 GHz microwave chamber
- Stainless steel and aluminum shield to protect from microwave radiation
- Rapid heating up to 20 ºC/minute speed
- Heating module inside microwave chamber with max. working temperature 1200°C
- Precision temperature control with 30 segments programable within +/- 1ºC
- Vacuum casting thermal insulation material for max. energy saving.
|
| Power |
- 2000W
- 208-240VAC, Single phase, 50/60Hz
|
Microwave
|
- Frequency: 2.45 GHz ±25 MHz
- Power Output: 1400W
- Microwave leaking: ≤ 3 mW/cm² at 1 meter away.
- One digital power controller is built in to adjust output power from 10 - 100%
|
Heating Module and
Processing Tube
|
- Ni-Cr-Al wire heating coin with 80 mm ID is installed inside fibrous alumina module (Pic. 1)
- The heating coil is placed inside the microwave chamber
- 2" quartz tube ( OD 50 x ID 44x L 600 mm) is inserted inside the heating module and microwave chamber to produce plasma (Pic.2)
 Pic. 1  Pic. 2
|
Flanges & Vacuum
|
- One pair of vacuum flange is included to seal the quartz tube
- KF25 vacuum port and 1/4 gas inlet and outlet with needle valves are built-in the flange ( Pic. 1)
- One digital vacuum gauge is included for vacuum control ( Pic. 2)
- Max. Vacuum level: 10-2 torr by dry pump and 10-5 torr by turbopump.
- The pump is not included. Please click Pic. 3 to order separately. For CVD application, suggest choosing a dry pump.
|
|
Working Temperature
|
- Max. 1200ºC < 30 minutes with heating module assisted
- Min. 800ºC with heating module assisted
- ≤1100ºC continuous with heating module assisted and Plasma
- Heating rate: 1 ~20°C / min programmable
- ~750ºC heating by microwave only without temperature control
|
|
Temperature Controller
|
- 30 segments programmable for heating rate, dwell temperature and time, and cooling rate
- SCR temperature control
- Over-temperature and thermal couple broken protection
- Control accuracy +/-1.0 ºC
- K-type thermal couple inserted through the flange
|
|
Compliance
|
- CE Certified
- NRTL or CSA certification is available upon request
|
|
Operation Video
|
|
Pic. 1 
Pic. 1 
Pic. 2 
Pic.3
