• Three Zones Tube Furnace (4") with Vacuum Pump (1.0E-4 torr) + 9 Channel Digital Gas Flow-meters for CVD - OTF-1200X-4-III-9HV
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Three Zones Tube Furnace (4") with Vacuum Pump (1.0E-4 torr) + 9 Channel Digital Gas Flow-meters for CVD - OTF-1200X-4-III-9HV

Three Zones Tube Furnace (4") with Vacuum Pump (1.0E-4 torr) + 9 Channel Digital Gas Flow-meters for CVD - OTF-1200X-4-III-9HV

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SKU: OTF1200XIIIC9HV

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OTF-1200X-4-III-9HV is CE certified 4" diameter split three-zone tube furnace with vacuum pump system (up to 10-4 torr) and 9 channel PLC Touch Panel precision digital Mass flow meters Gas Control System, which can control nine types of gases for CVD or diffusion(Updated with PLC Touch Panel Gas control system since August 3, 2015 ).

Specifications

Furnace


 Structure
 Double-layer steel casing with air cooling.
High purity alumina fiberboard liner for energy cost-effective operation.
Three heating zones with three independent temperature controllers.
Vacuum and gas mixing system are located in the bottom Mobile cart with 4 wheels.
Heating Element
 Fe-Cr-Al Alloy doped by Mo
Max. Heating Temp.
 1200°C
Continuous Heating Temp.
 1100°C
Max. Heating Rate
 <=20°C/min
Heating Zone Length
 Three zones:   (880mm,  35" in total)
Zone 1: 220 mm + Zone 2:  440 mm + Zone 3: 220 mm
Constant Temp. Zone
 20" (500 mm) length (three zones at equal temperature within +/- 1°C)
Tube Size and Materials
 Fused Quartz Tube
100 mm O.D x 92 mm ID. x 1400 mm
Temp. Controller
 Three programmable precision digital temperature controllers with 30 segments, which control each heating zone separately.
PID adjustable with auto tune function to ensure temperature stability within  +/ - 1 oC.
Full protection in each controller for over-temperature and broken thermal couple.
Thermocouple
 Three K-type thermocouples
Power Input
 AC 208~240V, Single Phase, 50/60Hz, 7KW max.
Vacuum Fittings
The Standard vacuum accessories include:
  • Two stainless steel vacuum flanges with KF-25 pump connector, two needle valve and one 1/4" Swagelok tube connector.
  • Six pieces of  high-temperature silicone O-ring for using under 300°C.
  • Two pairs of alumina thermo-blocks are included for protecting flange from heat radiation.
  • One KF-40 vacuum bellows
  • Three KF-40 quick clamps.
  • Two KF-25 quick clamps.
HV Station
High Vacuum Station


 Structure Mobile cart size:  600 (L) x 600 (W) x 700(H), mm
Max. Loading:       600 Lbs on top
Molecular pump control Panel:   LCD digital
Inside:   Pfeiffer vacuum pump  Made in Germany
Vacuum sensor is included
Vacuum sensor The vacuum sensor has a KF-25 connector.
High vacuum gauge (measuring range 10^-8 mbar ~ 10^3 mbar)
Control Panel One button operation - the diaphragm pump and the turbomolecular pump will start after pressing the "start" button.
System controlled spinning speed - the controller will control the speed of the turbine spinning up and down according to the vacuum level and leaking rate of the reaction chamber.
Self-protection - the system will protect the pump from damage by overheating and overcurrent if the leaking rate of the reaction chamber is too high to achieve the high vacuum.
LCD screen - double lines parameters checking interface make the working easier to be handled.
Self-testing
 Spinning up Error report
 Voltmeter
  Full speed
Volume Flow Rate Nitrogen   N2     33 L/s
Helium     He     39 L/s   (2340L/minute)
Hydrogen   H2     32 L/s
Working Range From 1000 mbar to <1E-7 mbar
Ultimate Pressure 10^-5 torr (with tube furnace)
Power Input 110V AC or 220V AC switchable, 50/60Hz
Power consumption Duration/Max power: 100/110Watt
MFC Station
Mass Flow Controller


      
     
 9 precision mass flow meters controllers are installed in the bottom mobile cart with the digital display panel of +/-1.5% of Full Scale.
  • Controller 1: 0~100 SCCM
  • Controller 2: 1~199 SCCM
  • Controller 3: 1~199 SCCM
  • Controller 4: 1~499 SCCM
  • Controller 5-9: measuring range can be customized upon request
The flow rate control range is available for customization. Please contact us for detail information.
Optional Parts
  • Click the picture below - left to order bubbler or evaporator for CVD
                    
Gas Pipe Connect
  • One 1/4“ Swagelok tube connect is installed in the left flange as the gas inlet.
  • Each MFC Station has four 1/4" Swagelok tube connects. And four on/off valves for each gas route. The fifth one is used as the gas outlet.
  • The 1/4" PTFE gas pipe is included in the standard package.
  • [Optional] If a Stainless steel 1/4" gas tube is needed, please click here to order.
Shipping Info
 Dimension
 Furnace:     550 x 380 x 520mm
MFC Station: 600 x 600 x 700mm
HV Station:  600 x 600 x 700mm
Weight
 Net weight: 100Kg
Shipping weight: 350 lb (two pallets)
Warranty
 One year limited warranty (Consumable parts such as processing tubes, o-rings, and heating elements are not covered by the warranty, please order the replacement at related products below.)
Compliance
  • CE/UL/CSA Certificate
  • Please select the certificate in options bar:
    • CE Certificate & UL/CSA ready to pass UL/CSA certificate at extra cost
    • UL certificate -  UL approvals (UL 61010)
                  
Warning

Click here to learn the installation of a gas regulator
  • The tube furnaces with quartz tube are designed for use under vacuum and low pressure < 0.12 MPa (absolute pressure)
  • Attention: A two-stage pressure regulator must be installed on the gas cylinder to limit the pressure to below 3 PSI for safe operation. Click here to learn the installation of a gas regulator.
  • The flow rate for gasses should be limited to < 200 SCCM (or 200 ml/min) for reducing thermal shocks to the tube
  • Vacuum limit definition for all quartz tube furnaces: * Vacuum pressures may only be safely used up to 1000°C 
Operation Instructions      Quick test instruction
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