• Single-phase 220 VAC+/- 10%, 50 / 60 Hz
• 4200 W (including a vacuum pump and water chiller)

• One 1" Magnetron Sputter head with a High Vacuum Quick Connector is included. The head is made from sputtering from bottom to up ( Please click picture left )
• The distance between the sputtering head and the sample stage is adjustable from 60 to 100 mm
• A manually rotated baffle plate is built between the sputtering head and the sample stage to avoid contamination
• One sputtering power source is included. You may choose either DC or RF source based on target materials:

• DC source: 500 W power for coating metallic materials (Pic 1)
• RF source: 300 W power, 13.56 MHz frequency for coating non-conductive materials (Pic 2)

Thermal Evaporating 

• One evaporation source is installed on the bottom of the vacuum chamber
• The tungsten heating coil is built in an alumina crucible.
• SS316 crucible is available upon request for evaporating Li-metal
• An S-type thermal couple is the installed bottom of the crucible
• Max. evaporation temperature is 1350oC 
• Temperature is controlled precisely by a programmable temperature controller in a touchscreen panel.

Vacuum Chamber

• Vacuum chamber: 250 mm Dia. x 360 mm Height, made of stainless steel
• View window: 100 mm diameter quartz glass with vacuum-sealed
• The top flange of the chamber can move up & down by an electric motor to load the sample
• The rotary and heatable sample holder is installed on the top flange 
• The sample holder size: 100 mm
• The heating temperature of the sample holder: 700oC Max ±3. with 30 segments programmable
• The turbo-pump ( included) is connected to the chamber directly via a KF60 flange with an electric gate valve
• Electrodes of evaporation are through via the KF63 flange
• One KF35 flange is built to install an optional film thickness-measuring device 
• Gas inlet and outlet port and valves are included
• Max vacuum level: 8x10-6 torr cold state )

• One digital temperature-controlled recirculating water chiller is included. (Click picture to see details)
• Refrigeration range: 5~35 °C
• Flow rate: 16 L/min
• Pump pressure: 14 psi

• 7" color touchscreen panel is installed to control
• Evaporation temperature
• Sample stage temperature and rotation speed
• Vacuum pump on/ off and display vacuum level
• Vacuum valve on/off

• Precise quartz Film Thickness Monito is optional, which can be into the chamber to monitor coating thickness with an accuracy of 0.10 Å
• Precision Thin Film & Coating Analysis Systems - TFMS-LD is available at extra cost

Compliance

• CE approval
• NRTL certification is available upon request at extra cost, please contact our sales representative for the quote.